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Nitrogen Trifluoride

Specifications:

47L

Material:

Carbon Steel Bottle

Purity:

99.996%

CAS:

7783-54-2

UN:

2451

Dangerous Goods Category:

2.2 & 5.1

Product Details

Nitrogen trifluoride (NF₃) is an inorganic compound that is a colorless gas at room temperature and pressure, and has strong irritants. It is mainly used in plasma etching processes in semiconductor manufacturing, and also serves as a high-energy fuel and oxidant. Nitrogen trifluoride is toxic and reacts with water vapor in the atmosphere to produce nitric acid and hydrofluoric acid, causing environmental pollution.

Gas Inspection Report

Specifications 99.996%
Carbon Tetrafluoride ≤20ppm
Nitrogen ≤5ppm
Oxygen+Argon ≤3ppm
Carbon Monoxide ≤1ppm
Carbon Dioxide ≤0.5ppm
Nitrous Oxide ≤1ppm
Sulfur Hexafluoride ≤2ppm
Water Content ≤1ppm
Hydrogen Fluoride ≤1ppm

Key words:

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