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Carbon Tetrafluoride

Specifications:

40L

Material:

Carbon Steel Bottle

Purity:

99.999%

CAS:

75-73-0

UN:

1982

Dangerous Goods Category:

2.2

Product Details

Carbon tetrafluoride (CF₄), also known as tetrafluoromethane or perfluoromethane, is a compound that is a colorless gas at room temperature and pressure. It can be regarded as both a halogenated hydrocarbon (organic compound) and an inorganic compound. Carbon tetrafluoride has the characteristics of good chemical stability, good oxygen solubility, non flammability, and non corrosiveness. It is soluble in chloroform and benzene, but insoluble in water. It is mainly used in plasma etching processes for various integrated circuits, and is also used as a laser gas, low-temperature refrigerant, solvent, lubricant, insulation material, and coolant for infrared detection tubes.

Gas Inspection Report

Specifications 99.999%
Oxygen+Argon ≤1ppm
Nitrogen ≤2ppm
Hydrogen ≤0.3ppm
Carbon Monoxide ≤0.3ppm
Carbon Dioxide ≤0.3ppm
Sulfur Hexafluoride ≤0.3ppm
Tetrahydrocannabinol ≤0.3ppm
Trifluoromethane ≤0.3ppm
OFC ≤1ppm
Water Content ≤1ppm
Hydrogen Fluoride ≤0.1ppm

Key words:

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